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Equipment Automation

Advanced Engineering Services Equipment Automation

Equipment Automation

Posted By aesblog

Equipment Automation



Matrix EFEM

Matrix EFEM

Matrix-EFEM (Environmental Front End-Module) is designed to be integrated into any semiconductor process tool for front-end or back-end applications.

  • Can handle 300mm, 200mm, 150mm, and reticles.
  • Matrix Ranges from 1-4 Load port configurations.
  • Modular design.
  • Can be interfaced with AES’s complete line of wafer and reticle handling equipment:
    – Single or dual arm robots.
    – Pre-aligners
    – FOUP or SMIF openers.
    – FOSB openers.
    – Reticle cassettes.
    – Single or dual arm robots.

Enigma Tool Buffer

Enigma Tool Buffer

The Enigma™ is the next generation in 300mm FOUP and 200MM Buffers.

  • Fully Automatic.
  • High density storage capacity.
  • Advanced storage management software.
  • Smallest footprint.
  • Motion Control.
  • Highly advanced and reliable robotics solution.
  • Up to 16 FOUP or SMIF storage capacity.
  • Integrated System controller with single line Ethernet communication.
  • I/O Load Port Capable of interfacing with AGV, PGV, and OHT systems.
  • S2 and S8 Compliant.

200mm SMIF

200mm SMIF

The ExpressLoad-200™ is an advanced load port for 200mm wafer SMIF carriers. Designed to meet SEMI standards, ExpressLoad-200™ features the cleanest and most reliable SMIF interface solution for your process requirements.

Integrated with state-of-the art wafer mapping the ExpressLoad-200 is capable of detecting crossed slotted, double, or missing wafers in the SMIF cassette prior to processing. With a Single line Ethernet communication and advanced UI the ExpressLoad-200 is easily integrated into your process tool.

  • Kinematics couplings for accurate alignments.
  • Minimized particle generation.
  • N2 Purge Port for purging the SMIF pod (option).
  • S2 and S8 Compliant.
  • E64 Cart Docking Interface.
  • E15.1 Bolts Interface.


Benefits of Our Services-
  • Cost Reduction
  • Efficient Product Lifecycle Management
  • Product Improvement
  • Safety Considerations
  • Vendor-Driven Change

Working with AES can help customers to access global talent and work with them very closely. The AES provides 24/7 support for all the services with onshore workforce in USA and offshore workforce in India. AES can help customers during peak and valley loads in their staffing and engineering requirements. Customers can focus on innovation while AES helps them in all engineering activities. AES is equipped with the right infrastructure to achieve overall cost reduction without compromising performance.



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