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E-beam Enclosure

E-Beam (Electron beam) lithography is today’s standard technology for application in the world of nanotechnology. For this process to be successful, the highest level of temperature, humidity, EMI and vibration control has to be achieved.
AES is the leader in the design and development of custom E-beam enclosures for the semiconductor industry. AES Automation provides a complete solution for your E-beam requirements which includes the following:

Precision Air Handling:

The EVAC Air handling system (Environmental Air Control) is engineered to supply the E-beam enclosure with remote precision controlled temperature/humidity air supply. The EVAC can be integrated with AMC chemical filtration to filter any harmful chemicals from the ambient environment.

Air Handling Features include:

  • Temperature control: ±0.01°C.
  • Humidity Control: ±0.1% RH (Relative Humidity).
  • Single or multiple outputs.
  • 100-12,000 CMF output solutions.
  • EMI Reduction: Less the 0.1MG.


Benefits of Our Services-
  • Cost Reduction
  • Efficient Product Lifecycle Management
  • Product Improvement
  • Safety Considerations
  • Vendor-Driven Change

Working with AES can help customers to access global talent and work with them very closely. The AES provides 24/7 support for all the services with onshore workforce in USA and offshore workforce in India. AES can help customers during peak and valley loads in their staffing and engineering requirements. Customers can focus on innovation while AES helps them in all engineering activities. AES is equipped with the right infrastructure to achieve overall cost reduction without compromising performance.



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